Based on KLA Instruments’ revolutionary Multi-Mode measurement approach, the Zeta-388 optical profiler packs the power of five separate measurement tools into a single compact platform. The Zeta-388 ...
ZDot™ structured illumination 3D imaging is the standard measurement technique used on KLA Instruments Zeta optical profilers. ZDot technology, combined with KLA’s transmissive and dark field ...
Coupled with an optional isolation table, the Zeta-300 delivers accuracy and repeatability unmatched by other optical profilers, and is designed to support both R&D and production environments. In ...
Zeta Instruments designs and manufactures Multi-Mode non-contact optical profilers and defect inspection systems for multiple high-technology industries, including: advanced semiconductor packaging, ...