The system also gives a higher reliability for wafer handling robotics as it allows reduced wafer transfer speeds without compromising wafer throughput. The dual-flow concept makes it possible to ...

Bowed wafers enter the system at two cassette tilt stations. Wafer handling is via a robot fitted with an edge grip end effector. Wafers are oriented on a notch finder, with wafer ID captured by a ...

What’s more impressive is that one 2-inch silicon wafer could be used to create 10,000 ... promising for mass production and use in tiny robots that function independently.