The F40 configuration is typically determined for a specific film thickness range, from the F40-UV for measuring films as thin as 4nm, to the F40-XT measuring films up to 350µm thick. The F40 may be ...
non-contact measurement system designed to measure wafers up to 300mm in diameter for both thickness and total thickness variation (TTV). The system is portable, fast, precise, reliable, and easy to ...
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