This week, it turned out that Shanghai Microelectronics Equipment (SMEE) had applied for a patent covering an EUV lithography ...
Extreme Ultraviolet (EUV) lithography is a critical technology for manufacturing semiconductor chips smaller than 7 ...
Soon after, Chinese firm Naura Technology announced that it was jumping into the lithography tools market, alongside Shanghai Micro Electronics Equipment Group (SMEE). China will not take these ...
Shanghai Micro Electronics Equipment Group Co Ltd (SMEE), China’s only lithography company, can produce 90-nanometers chips, well behind that of the Netherlands’ ASML, which is producing those ...