Anisotropic etching and bulk micromachining of silicon are critical processes in the fabrication of micro-electromechanical systems (MEMS) and other microstructures. These techniques allow for the ...
One significant area of research is the use of ultrafast lasers for micromachining silicon. Studies have demonstrated that mid-infrared (mid-IR) femtosecond lasers can achieve high energy ...
This technology is firmly based on a unique manufacturing paradigm, micromachining. Micromachining is a core technology that enables the MEMS and related new approaches in engineering and science.
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