RF generators for plasma systems play a crucial role in various applications, including semiconductor manufacturing, materials processing, and surface modification. These generators provide the ...
The Plasma Sources and Applications Centre (PSAC) was established in 2001 through co-funding from the AcRF and A*STAR. Since then the Centre is continuously growing and aims the following main ...
RF Power,Backward Wave,Collector Surface,Conversion Efficiency,Electron Density,Electron Emission,Finite-difference Time-domain,High Electric Field,High Field,High Power,Low Pressure,Microwave ...
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