Keywords: Microelectromechanical systems technology, Acoustic sensors and resonators, optoelectronic devices, Acoustic filters, photonic and phononic devices, microfluidics, Piezoelectric materials, ...
His research interests include piezoelectric microelectromechanical system (MEMS) resonators for sensors and actuators, radio frequency (RF) wireless communications, microfabrication techniques, ...
MEMS piezoelectric transducers are tiny devices ... electrical and mechanical characteristics of the transducer, such as resonance frequency, impedance, capacitance, charge, voltage, displacement ...
Resonance Frequency,Top Electrode,Piezoelectric Layer,Aluminum Nitride,Residual Stress,Sound Pressure,Phase Noise,Piezoelectric MEMS,Power Consumption,Parasitic ...
electrostatic and piezoelectric MEMS resonators, piezoelectric energy harvesting, multi-sensor networks, and system integration. Dr. Puchades has significant industry experience having worked as an RF ...
Definition: NEMS (Nanoelectromechanical Systems) are smaller-scale versions of MEMS (Microelectromechanical Systems ... Graphene electrodes revolutionize the scaling of piezoelectric NEMS resonators.