This chapter reviews the operation of five low vacuum pumps: rotary vane, scroll, screw, diaphragm, and dry reciprocating piston; and the lobe and claw medium vacuum pumps. Vane pumps are widely used ...
German researchers at Saarland University and the Center for Mechatronics and Automation Technology (ZeMA) are working to advance vacuum technology. They have designed small pumps and valves that ...
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