The motion platform is based on an electro-pneumatic hexapod system with six degrees of freedom, the MOOG type MBEP-6DOF/60/14000kg. This motion system enables precise movements in three linear ...
inspection and production of semiconductor and photonics related products: Magnetic Levitation, Air Bearing Multi-Axis Stages and fast 6-DOF Motion Platforms (Hexapod) for image stabilization testing.
This stage provides ultra-precision in miniature format. Integrating the noncontact elements leads to a frictionless motion platform that offers the best quality, performance, and lifetime.
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